Excimer Calcium Fluoride Laser Optics & Lenses

Recognized as a primary manufacturer of optical components for microlithography, REFLEX Analytical supports Excimer Grade CaF2 requirements which are critical in the production of advanced semiconductor chips for 157nm and 193nm technology. The material exhibits low laser induced absorption and is preselected according to the <111> and <001> crystal orientations for each lens element to achieve zero or near zero intrinsic birefringence. Other axial preferences include <100> and <010>. The material is selected and tested to be fluorescence free. Contact REFLEX Analytical to discuss your specifications.