Auto Spectroscopy
Product Description
This accessory can be used in reflectance or transmission
modes. The semiconductor industry has determined its
reflectance capability a comprehensive solution in
semiconductor wafer characterization; particularly the
determination of epitaxial layer thickness (EPI), and
measurements of Borophosphosilicate Glass (BPSG) and
carbon-oxygen. The device is also ideal for characterizing
non-semiconductor materials such as films and coatings on
reflective substrates.The latest reflectance design can
accomodate 12" diameter wafers with added expansion for
inserts to support 2 - 8" diameter wafers. Submit your
request if such capacity is required hence the product
presented to purchase represents an 8" wafer mount with
expansion for inserts to support 2 - 6" diameter wafers in
a demountable spring loaded, delrin support mechanism.
The accessory incorporates linear translation and rotation motor drives, managed by a motion control unit with integrated AutoPro programmable software. This offers analysis of any sequence of points on the sample and controls spectral data acquisition. Sophisticated test sequences can be easily designed, implemented and stored as method with full flexibility. To offer an understanding of the software's accuracy, an instrument with an 8mm beam diameter can measure up to 320 points on a 12" sample with a 5mm setting for edge exclusion. The software interfaces easily with Microsoft Windows based programs via DDE links and seamlessly integrates with the spectrometer's software. It's a complete solution entailing a hardware and software package for automated, multi-position data collection and processing.
Alternatively, the optical system as used for reflectance is available in transmission mode with a standard 60 position, 13mm diameter multisample mount. For more demanding applications, a 12" diameter, 114 position, 13mm diameter multisample mount can be provided as an option. The sampling plate can be configured for any combination of sample number, type and geometry and can be used for a wide range of samples including films, slides, pellets, windows and large area samples. A transmission-only version is available with 6" diameter capacity which accommodates a 32 position, 13mm diameter multisample mount. Offer request for current pricing.
The accessory incorporates linear translation and rotation motor drives, managed by a motion control unit with integrated AutoPro programmable software. This offers analysis of any sequence of points on the sample and controls spectral data acquisition. Sophisticated test sequences can be easily designed, implemented and stored as method with full flexibility. To offer an understanding of the software's accuracy, an instrument with an 8mm beam diameter can measure up to 320 points on a 12" sample with a 5mm setting for edge exclusion. The software interfaces easily with Microsoft Windows based programs via DDE links and seamlessly integrates with the spectrometer's software. It's a complete solution entailing a hardware and software package for automated, multi-position data collection and processing.
Alternatively, the optical system as used for reflectance is available in transmission mode with a standard 60 position, 13mm diameter multisample mount. For more demanding applications, a 12" diameter, 114 position, 13mm diameter multisample mount can be provided as an option. The sampling plate can be configured for any combination of sample number, type and geometry and can be used for a wide range of samples including films, slides, pellets, windows and large area samples. A transmission-only version is available with 6" diameter capacity which accommodates a 32 position, 13mm diameter multisample mount. Offer request for current pricing.
